Scanning Electron Microscopy

Scanning Electron Microscopes

Location: LFG, Haberstraße 9a, 91058 Erlangen, Room U1.825 (GeminiSEM500); LFG, Cauerstraße 4, 91058 Erlangen, Room 0.542 (GeminiUltra55)

Scanning electron microscopes (SEMs) scan samples with a focused beam of electrons and capture images that provide information about the sample’s topography and composition. SEM images provide high-resolution, surface-sensitive information and material contrast – ideal for characterization in nanotechnology, materials research, life sciences, semiconductors, raw materials and industrial applications.

M. Sc. Jonathan Martin Gonzalez, Dipl.-Ing. Michael Auer (GeminiSEM500)

Dipl.-Ing. Bettina Winzer, Dipl.-Ing. Michael Auer (Gemini Ultra55)

Scanning Electron Microscope, Carl Zeiss, GeminiSEM500

The GeminiSEM500 is used for nanometre scale EDS analysis with low kV FE-SEM and windowless EDS detector. The combination of scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDS) is a common method for analysing the morphology and chemistry of materials. The characterisation of nanoscale structures, such as quantum dots or nanoparticles, is challenging because the resolution of EDS analysis is typically limited to micrometres as it depends on the interaction volume of the electron beam with the sample. However, with a high resolution low kV SEM and a windowless EDS detector, the resolution can be reduced to 10 nm. In addition to its resolution down to 10 nm, the GeminiSEM500 stands for good image quality, ease of use and high flexibility.

  • Resolution: 0.5 nm at 15 kV; 0.9 nm at 1 kV; 1.0 nm at 500 V
  • Acceleration voltage: 0.02 – 30.0 kV
  • Magnification: 50x to 2,000,000x
  • High efficiency integrated secondary electron detector for ultra-high resolution surface information
  • Integrated energy selective backscattered electron detector (EsB) for contrast visualisation of material composition at low voltages
  • Motorised stage with 6-axis motion
  • Integrated 100 mm sluice

Scanning Electron Microscope | Zeiss, Gemini Ultra55 mit EDX

Location: LFG, Cauerstraße 4, 91058 Erlangen, Raum 0.542

Device Managers: Bettina Winzer, Michael Auer

The Ultra 55 is one of the latest developments in GEMINI® technology and consists of a fully integrated energy and angle selective backscattered electron (ESB) detector. The Ultra 55 offers extremely high resolution for both secondary electrons (SE) to image surface information and backscattered electrons (BSE) to image compositional information. The ESB detector has a built-in filter grid to improve image quality and requires no additional adjustment. The ESB detector is less sensitive to edge contrast and charging effects, allowing precise imaging and measurement of boundaries, particles and features. Combined with the large multi-port analysis chamber, fully motorized 5-axis eccentric stage and GEMINI® high current mode, the ULTRA 55 also offers excellent analytical capabilities.

  • Resolution: 1.0 nm @ 15 kV; 1.7 nm @ 1 kV, 4.0 nm @ 0.1 kV
  • Acceleration voltage: 20 V to 30 kV
  • Detectors: AsB (Angle Selective Backscatter) detector, filter grid EsB detector (grid voltage 0 to 1500 V), BSE, high efficiency in-lens SE detector, Everhart-Thornley SE/BSE secondary electron detector, EDAX Trident EDS detector
  • Image processing: resolution up to 3072 x 2304 pixels with noise reduction through seven integration and averaging modes
  • Complementary analysis: EDX
  • Emitter: thermal field emission gun (FEG), stability > 0.2%/h
  • Probe current: 4 pA to 30 nA with AsB (Angle Selective BSE) detector at very short working distances
  • 5-axis motorized eccentric stage: X = 130 mm / Y = 130 mm / Z = 50 mm, tilt = -3 to 70°, rotation = 360° (continuous)
  • Chamber: 330 mm (Ø) x 270 mm (H), 2 EDS ports 35° TOA, CCD camera with IR illumination

https://www.zeiss.com/microscopy/de/produkte/sem-und-fib-sem/sem/die-geminisem-produktfamilie.html

Further information to follow